Publisher
Showing results 1 to 2 of 2
Park, J. S.; Park, H. J.; Hahn, Y. B.; Yi, Gyu-Chul; Yoshikawa, A.
J. Vac. Sci. Technol. B 21, 800 (2003)
Yoo, Jinkyoung; Park, Won Il; Yi, Gyu-Chul
J. Vac. Sci. Technol. B 23, 1970 (2005)