S-Space College of Engineering/Engineering Practice School (공과대학/대학원) Dept. of Mechanical Aerospace Engineering (기계항공공학부) Theses (Ph.D. / Sc.D._기계항공공학부)
Study on the prediction of thermal evaporated thin film profile in Roll-To-Roll process by Virtual Collision Direct Simulation Monte Carlo
가상충돌 몬테카를로 직접모사 방법을 통한 롤투롤 열기상 증착공정의 증착 형상 예측에 관한 연구
- Jeong-Il Mun
- 공과대학 기계항공공학부
- Issue Date
- 서울대학교 대학원
- Uniformity of Thin film; Thermal Evaporation; DSMC; Linear Source; Organic Thin film; Efficiency of Thermal evaporation
- 학위논문 (박사)-- 서울대학교 대학원 : 기계항공공학부, 2016. 2. 박희재.
- In this paper, the study to improve the performance of a simulation that is carried out to anticipate deposition profile of an organic thin film deposited by thermal evaporator is conducted. To anticipate a deposition profile, Direct Simulation Monte Carlo(DSMC) has been used to simulate a deposited profile shape. This is a way to expect gas flows in a high vacuum area where a continuum equation is no longer valid and molecules discrete effect is critical. However, the simulation time to analyze the flow in high vacuum rapidly increases when it applies to simulate background gas inside a chamber. In this paper, algorithm to reduce analysis time of a simulation when the background gas exists inside a chamber was suggested and tested. Also, this paper studies how to optimize uniformity of linear crucible and how to improve the material usage efficiency.