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Characteristics of atmospheric dielectric barrier discharge plasma for photo-resistor etching
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 김곤호 | - |
| dc.contributor.author | 송상헌 | - |
| dc.date.accessioned | 2009-11-17 | - |
| dc.date.available | 2009-11-17 | - |
| dc.date.copyright | 2005. | - |
| dc.date.issued | 2005 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000052782 | eng |
| dc.identifier.uri | https://hdl.handle.net/10371/12285 | - |
| dc.description | Thesis(master`s)--서울대학교 대학원 :원자핵공학과,2005. | eng |
| dc.format.extent | ix, 60 leaves | eng |
| dc.language.iso | en | eng |
| dc.publisher | 서울대학교 대학원 | eng |
| dc.subject | 대기압 유전체 격벽 방전 | eng |
| dc.subject | atmospheric dielectric barrier discharge | eng |
| dc.subject | 소모 전력 밀도 | eng |
| dc.subject | dissipated power density | eng |
| dc.subject | 경계층 | eng |
| dc.subject | boundary layer | eng |
| dc.subject | 감광제 | eng |
| dc.subject | photo-resistor | eng |
| dc.subject | 식각 | eng |
| dc.subject | etching | eng |
| dc.subject | 가스혼합비 | eng |
| dc.subject | gas mixing rate | eng |
| dc.subject | 기판온도 | eng |
| dc.subject | substrate temperature | eng |
| dc.title | Characteristics of atmospheric dielectric barrier discharge plasma for photo-resistor etching | eng |
| dc.type | Thesis | - |
| dc.contributor.department | 원자핵공학과 | - |
| dc.description.degree | Master | eng |
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