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Characteristics of atmospheric dielectric barrier discharge plasma for photo-resistor etching

DC Field Value Language
dc.contributor.advisor김곤호-
dc.contributor.author송상헌-
dc.date.accessioned2009-11-17-
dc.date.available2009-11-17-
dc.date.copyright2005.-
dc.date.issued2005-
dc.identifier.urihttp://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000052782eng
dc.identifier.urihttps://hdl.handle.net/10371/12285-
dc.descriptionThesis(master`s)--서울대학교 대학원 :원자핵공학과,2005.eng
dc.format.extentix, 60 leaveseng
dc.language.isoeneng
dc.publisher서울대학교 대학원eng
dc.subject대기압 유전체 격벽 방전eng
dc.subjectatmospheric dielectric barrier dischargeeng
dc.subject소모 전력 밀도eng
dc.subjectdissipated power densityeng
dc.subject경계층eng
dc.subjectboundary layereng
dc.subject감광제eng
dc.subjectphoto-resistoreng
dc.subject식각eng
dc.subjectetchingeng
dc.subject가스혼합비eng
dc.subjectgas mixing rateeng
dc.subject기판온도eng
dc.subjectsubstrate temperatureeng
dc.titleCharacteristics of atmospheric dielectric barrier discharge plasma for photo-resistor etchingeng
dc.typeThesis-
dc.contributor.department원자핵공학과-
dc.description.degreeMastereng
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Energy Systems Engineering (에너지시스템공학부)Nuclear Engineering (원자핵공학전공)Theses (Master's Degree_원자핵공학과)
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