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College of Engineering/Engineering Practice School (공과대학/대학원)
Dept. of Energy Systems Engineering (에너지시스템공학부)
Nuclear Engineering (원자핵공학전공)
Theses (Ph.D. / Sc.D._원자핵공학과)
Effects of plasma characteristics on homogeneous nucleation in diamond chemical vapor deposition process with supersonic arc-jet plasma
초음속 아크젯 플라즈마를 이용한 다이아몬드 화학기상증착 공정에서 플라즈마 특성이 균질 핵생성에 미치는 영향
- Authors
- 이찬민
- Advisor
- 홍상희
- Issue Date
- 2008
- Publisher
- 서울대학교 대학원
- Keywords
- 초음속 아크젯 플라즈마; supersonic arc-jet plasma; 다이아몬드 박막; diamond film; 열플라즈마 화학기상증착; thermal plasma chemical vapor deposition; 균질 핵생성 원리; homogeneous nucleation mechanism; 열영동 포집; themophoretic sampling; 방출분광분석; optical emission spectroscopy
- Description
- Thesis(doctors) --서울대학교 대학원 :원자핵공학과,2008.8.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000041492
http://hdl.handle.net/10371/12568
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