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Effects of plasma characteristics on homogeneous nucleation in diamond chemical vapor deposition process with supersonic arc-jet plasma : 초음속 아크젯 플라즈마를 이용한 다이아몬드 화학기상증착 공정에서 플라즈마 특성이 균질 핵생성에 미치는 영향

DC Field Value Language
dc.contributor.advisor홍상희-
dc.contributor.author이찬민-
dc.date.accessioned2009-11-17T23:15:15Z-
dc.date.available2009-11-17T23:15:15Z-
dc.date.copyright2008.-
dc.date.issued2008-
dc.identifier.urihttp://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000041492eng
dc.identifier.urihttps://hdl.handle.net/10371/12568-
dc.descriptionThesis(doctors) --서울대학교 대학원 :원자핵공학과,2008.8.eng
dc.format.extentxiii, 115 leaves.eng
dc.language.isoeneng
dc.publisher서울대학교 대학원eng
dc.subject초음속 아크젯 플라즈마eng
dc.subjectsupersonic arc-jet plasmaeng
dc.subject다이아몬드 박막eng
dc.subjectdiamond filmeng
dc.subject열플라즈마 화학기상증착eng
dc.subjectthermal plasma chemical vapor depositioneng
dc.subject균질 핵생성 원리eng
dc.subjecthomogeneous nucleation mechanismeng
dc.subject열영동 포집eng
dc.subjectthemophoretic samplingeng
dc.subject방출분광분석eng
dc.subjectoptical emission spectroscopyeng
dc.titleEffects of plasma characteristics on homogeneous nucleation in diamond chemical vapor deposition process with supersonic arc-jet plasmaeng
dc.title.alternative초음속 아크젯 플라즈마를 이용한 다이아몬드 화학기상증착 공정에서 플라즈마 특성이 균질 핵생성에 미치는 영향eng
dc.typeThesis-
dc.contributor.department원자핵공학과-
dc.description.degreeDoctoreng
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