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Effects of plasma characteristics on homogeneous nucleation in diamond chemical vapor deposition process with supersonic arc-jet plasma : 초음속 아크젯 플라즈마를 이용한 다이아몬드 화학기상증착 공정에서 플라즈마 특성이 균질 핵생성에 미치는 영향
DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | 홍상희 | - |
dc.contributor.author | 이찬민 | - |
dc.date.accessioned | 2009-11-17T23:15:15Z | - |
dc.date.available | 2009-11-17T23:15:15Z | - |
dc.date.copyright | 2008. | - |
dc.date.issued | 2008 | - |
dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000041492 | eng |
dc.identifier.uri | https://hdl.handle.net/10371/12568 | - |
dc.description | Thesis(doctors) --서울대학교 대학원 :원자핵공학과,2008.8. | eng |
dc.format.extent | xiii, 115 leaves. | eng |
dc.language.iso | en | eng |
dc.publisher | 서울대학교 대학원 | eng |
dc.subject | 초음속 아크젯 플라즈마 | eng |
dc.subject | supersonic arc-jet plasma | eng |
dc.subject | 다이아몬드 박막 | eng |
dc.subject | diamond film | eng |
dc.subject | 열플라즈마 화학기상증착 | eng |
dc.subject | thermal plasma chemical vapor deposition | eng |
dc.subject | 균질 핵생성 원리 | eng |
dc.subject | homogeneous nucleation mechanism | eng |
dc.subject | 열영동 포집 | eng |
dc.subject | themophoretic sampling | eng |
dc.subject | 방출분광분석 | eng |
dc.subject | optical emission spectroscopy | eng |
dc.title | Effects of plasma characteristics on homogeneous nucleation in diamond chemical vapor deposition process with supersonic arc-jet plasma | eng |
dc.title.alternative | 초음속 아크젯 플라즈마를 이용한 다이아몬드 화학기상증착 공정에서 플라즈마 특성이 균질 핵생성에 미치는 영향 | eng |
dc.type | Thesis | - |
dc.contributor.department | 원자핵공학과 | - |
dc.description.degree | Doctor | eng |
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