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Metal organic chemical vapor deposition of Pb(Zr,Ti)O3 on ir bottom electrode and effects of electrodes on electrical properties : 유기금속 화학기상 증착법으로 Ir기판에 Pb(Zr,Ti)O₃증착 및 하부전극에 의한 전기적 특성분석
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- Authors
- Advisor
- 황철성
- Issue Date
- 2006
- Publisher
- 서울대학교 대학원
- Keywords
- 유가금속 화학기상 ; MOCVD ; 누설전류 ; Liquid Delivery System (LDS) ; 피로 ; precursor ; 하부전극 ; PbO ; Pb(Zr ; Ti)O3 ; leakage current ; fatigue ; retention ; Self-regulation mechanism ; bottom electrode ; top annealing ; Curie Temperature ; in-situ
- Description
- Thesis(doctoral)--서울대학교 대학원 :재료공학부,2006.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000046494
https://hdl.handle.net/10371/12624
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