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Low temperature growth of carbon nano-tubes by internal type inductively coupled plasma assisted chemical vapor deposition : 내부형 유도결합 플라즈마 화학 기상 증착법을 이용한 카본나노튜브의 저온공정에 관한 연구
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 이정중 | - |
| dc.contributor.author | 정동하 | - |
| dc.date.accessioned | 2009-11-18 | - |
| dc.date.available | 2009-11-18 | - |
| dc.date.copyright | 2006. | - |
| dc.date.issued | 2006 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000046490 | eng |
| dc.identifier.uri | https://hdl.handle.net/10371/12640 | - |
| dc.description | Thesis(doctoral)--서울대학교 대학원 :재료공학부,2006. | eng |
| dc.format.extent | x, 98 leaves | eng |
| dc.language.iso | en | eng |
| dc.publisher | 서울대학교 대학원 | eng |
| dc.subject | 탄소나노튜브 | eng |
| dc.subject | carbon nano-tube(CNT) | eng |
| dc.subject | 저온공정 | eng |
| dc.subject | low temperature | eng |
| dc.subject | 유도결합플라즈마 | eng |
| dc.subject | inductively coupled plasma(ICP) | eng |
| dc.subject | 화학기상증착법 | eng |
| dc.subject | PECVD | eng |
| dc.subject | 스퍼터링 | eng |
| dc.subject | ICP assisted sputtering | eng |
| dc.title | Low temperature growth of carbon nano-tubes by internal type inductively coupled plasma assisted chemical vapor deposition | eng |
| dc.title.alternative | 내부형 유도결합 플라즈마 화학 기상 증착법을 이용한 카본나노튜브의 저온공정에 관한 연구 | eng |
| dc.type | Thesis | - |
| dc.contributor.department | 재료공학부 | - |
| dc.description.degree | Doctor | eng |
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