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유도결합 플라즈마 화학 기상 증착법을 이용한 TiB₂박막의 저온 증착 및 접착력 향상 기술에 관한 연구 : Deposition and adhesion enhancement of TiB2 coatings by inductively coupled plasma assisted CVD at low process temperature
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- Authors
- Advisor
- 이정중
- Issue Date
- 2006
- Publisher
- 서울대학교 대학원
- Keywords
- 유도결합 플라즈마 ; Inductively coupled plasma ; TiB2 ; Titanium diboride ; 저온 코팅 ; Low temperature deposition ; 농도경사 ; Compositionally gradient coating ; 접착력 ; Adhesion
- Description
- 학위논문(박사)--서울대학교 대학원 :재료공학부,2006.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000046487
https://hdl.handle.net/10371/12643
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