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Atomic layer deposition and characterization of SrTiO3 thin films : 단원자층 증착법으로 증착된 SrTiO₃박막의 증착 특성 및 물성 평가
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 황철성 | - |
| dc.contributor.author | 권오성 | - |
| dc.date.accessioned | 2009-11-18 | - |
| dc.date.available | 2009-11-18 | - |
| dc.date.copyright | 2006. | - |
| dc.date.issued | 2006 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000046479 | eng |
| dc.identifier.uri | https://hdl.handle.net/10371/12651 | - |
| dc.description | Thesis(doctoral)--서울대학교 대학원 :재료공학부,2006. | eng |
| dc.format.extent | xii, 151 p. | eng |
| dc.language.iso | en | eng |
| dc.publisher | 서울대학교 대학원 | eng |
| dc.subject | high-k | eng |
| dc.subject | SrTiO3 | eng |
| dc.subject | ALD | eng |
| dc.subject | precursors | eng |
| dc.subject | oxidant | eng |
| dc.subject | DRAM | eng |
| dc.subject | tox | eng |
| dc.subject | self-limiting mechanism | eng |
| dc.title | Atomic layer deposition and characterization of SrTiO3 thin films | eng |
| dc.title.alternative | 단원자층 증착법으로 증착된 SrTiO₃박막의 증착 특성 및 물성 평가 | eng |
| dc.type | Thesis | - |
| dc.contributor.department | 재료공학부 | - |
| dc.description.degree | Doctor | eng |
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