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Evaluation of strength, fracture, and fatigue properties of thin film materials for design criterion and reliability of the microelectromechanical systems : MEMS 소자의 설계 기준 및 신뢰성 확보를 위한 박막 소재의 강도 및 파괴, 피로 특성 평가

DC Field Value Language
dc.contributor.advisor권동일-
dc.contributor.author손동일-
dc.date.accessioned2009-11-18-
dc.date.available2009-11-18-
dc.date.copyright2004.-
dc.date.issued2004-
dc.identifier.urihttp://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000056102eng
dc.identifier.urihttps://hdl.handle.net/10371/12684-
dc.descriptionThesis(doctoral)--서울대학교 대학원 :재료공학부,2004.eng
dc.format.extentxvii, 279 p.eng
dc.language.isoen-
dc.publisher서울대학교 대학원eng
dc.subject미세전자기계시스템 (MEMS)eng
dc.subjectmicroelectromechanical system (MEMS)eng
dc.subject박막eng
dc.subjectmechanical propertieseng
dc.subject기계적 물성eng
dc.subjectstrengtheng
dc.subject강도eng
dc.subjectfractureeng
dc.subject파괴eng
dc.subjectfatigueeng
dc.subject피로eng
dc.subjectaluminumeng
dc.subject알루미늄eng
dc.subjectsiliconeng
dc.subject실리콘eng
dc.subjectnickeleng
dc.subject니켈eng
dc.subjectreliabilityeng
dc.subject신뢰성eng
dc.titleEvaluation of strength, fracture, and fatigue properties of thin film materials for design criterion and reliability of the microelectromechanical systemseng
dc.title.alternativeMEMS 소자의 설계 기준 및 신뢰성 확보를 위한 박막 소재의 강도 및 파괴, 피로 특성 평가eng
dc.typeThesis-
dc.contributor.department재료공학부-
dc.description.degreeDoctoreng
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