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Periodic crack formation in brittle thin film : 취성 박막에서의 주기적 균열 형성

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dc.contributor.advisor박윤-
dc.contributor.authorMyung Rae Cho-
dc.date.accessioned2017-07-19T06:08:40Z-
dc.date.available2017-07-19T06:08:40Z-
dc.date.issued2015-08-
dc.identifier.other000000066942-
dc.identifier.urihttp://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000066942-
dc.description학위논문(박사)--서울대학교 대학원 :자연과학대학 물리·천문학부,2015. 8. 박윤.-
dc.description.abstractCrack, failure of materials, is recognized as separation pattern of materials. Throughout human history we have struggled to avoid and prevent this phenomenon because crack occurrence inherently means that objects already lost its original integrity and functionality. Moreover microscopic flaws placed in the materials body will easily alter its growth characteristic. So by their catastrophic growth nature, crack patterns are usually chaotic and unpredictable. But Mother Nature always has some exceptions. These periodic or ordered crack patterns are quite distinctive because not only for their rarity but also for unexplained mechanism in most of cases. Here simple but noble generation of ordered crack from thin film system is demonstrated by using conventional semiconductor fabrication techniques and its governing conditions of periodic pattern are discussed. Strong confinement of thin film crack and arbitrary steering of its propagation are realized by inserting thin metallic layer, thin polymeric layer and even atomically thin graphene layer in between substrate and brittle thin film. This thin interlayer-mediated controllability comes from local debonding of brittle medium or effective analogues of debonding due to relatively weak adhesion or elastic softness of interlayer. Following experiments and numerical calculation using Extended Finite Element Method (XFEM) from our study reveal that this wavy crack is intrinsically analogous to so called brittle adhesive crack. Previous studies of periodic cracks such as metallic insertion layer, self debonding sol-gel film, and even drying colloidal film, could be explained by similar mechanism. This finding could provide simple analogy on various ordered periodic crack systems existing in nature. And also this simple but noble method to control crack path could lead to the development of new concept of nano fabrication techniques.-
dc.description.tableofcontents1 Introduction 1
1.1 Overview 1
1.1.1 Motivation 1
1.1.2 Overview of text 2
1.2 Brittle and ductile behaviors 3
1.3 Fracture dynamics 5
1.3.1 Griffiths energy balance approach 5
1.3.2 Fracture modes 6
1.3.3 Stress intensity factor 7
1.3.4 Fracture toughness 8
1.3.5 Linear fracture dynamics 9
1.4 Crack path prediction in mixed mode 10
1.5 Extended finite element method (XFEM) 10
1.6 Periodic crack in nature: literature review 11
1.6.1 Quenched glass case 11
1.6.2 Thin film periodic crack 13
2 Periodic crack generation by metal insertion layer 15
2.1 Motivation 15
2.2 Sample fabrication process 18
2.2.1 Cleaning and preparation of wafer 18
2.2.2 Lithography for deposition and lift off 19
2.2.3 Deposition of metal and SiO2 20
2.2.4 Spin on glass 21
2.2.5 Annealing process 21
2.3 Crack initiation: flaw, defect 22
2.3.1 FIB (Focused Ion Beam) milled notch 22
2.3.2 Metal pattern 23
2.3.3 Scratch 24
2.4 Crack path steering in curved way 26
2.5 Line density 28
2.6 Minimum width of crack track 30
2.7 Termination 31
2.8 Cross section inspection 33
2.9 Track width dependence of period 34
2.10 Discussion 35
3 Various insertion layers 36
3.1 Overview 36
3.2 Claim from previous study and thermal expansion stress scenario 36
3.3 Cavity sample 38
3.4 Polymer sample 40
3.5 Graphene sample 41
3.6 Crack steering with additional third (top) layer: stiffness rules 42
3.7 Discussion 44
4 Numerical approach for crack path prediction 47
4.1 Overview 47
4.2 Brittle adhesive crack case: similarity and implication 48
4.3 Numerical approach for cavity sample 49
4.4 Periodic mechanism 54
5 Controlled periodic crack system as application 55
5.1 Overview 55
5.2 Controlled nano channel: THz transmission 56
5.3 Nanowire generation template 58
5.4 Controlled cracking as material toughening tool 60
5.5 Discussion 62
6 Conclusion 63
6.1 Summary 63
6.2 Periodic thin film crack 64
6.3 Implication to other systems 65
6.4 Future work 67
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dc.format.extentx, 75-
dc.language.isoeng-
dc.publisher서울대학교 대학원-
dc.subjectPeriodic crack, Crack path control, Brittle crack, Thin film crack, Fracture dynamics-
dc.subject.ddc523-
dc.titlePeriodic crack formation in brittle thin film-
dc.title.alternative취성 박막에서의 주기적 균열 형성-
dc.typeThesis-
dc.typeDissertation-
dc.contributor.AlternativeAuthor조명래-
dc.contributor.department자연과학대학 물리·천문학부-
dc.description.degreeDoctor-
dc.date.awarded2015-08-
dc.identifier.holdings000000000023▲000000000025▲000000066942▲-
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