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Preparation and application of photoimageable bottom antireflective coating
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- Authors
- Advisor
- 조재영
- Issue Date
- 2006
- Publisher
- 서울대학교 대학원
- Keywords
- 하부 반사 방지막; 안트라센; 분해성 가교제; 리소그래피 ; bottom antireflective coating; anthracene; degradable crosslinker; lithography
- Description
- Thesis(master`s)--서울대학교 대학원 :화학생물공학부,2006.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000047850
https://hdl.handle.net/10371/13454
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