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Fabrication of PZT-Based piezoelectric thick film by aerosol deposition method and its application to piezoelectric devices : 에어로졸 증착법을 이용한 PZT계 압전 후막의 제조 및 압전 소자로의 응용

DC Field Value Language
dc.contributor.advisor김도연-
dc.contributor.author한병동-
dc.date.accessioned2009-11-18T22:44:16Z-
dc.date.available2009-11-18T22:44:16Z-
dc.date.copyright2008.-
dc.date.issued2008-
dc.identifier.urihttp://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000039475eng
dc.identifier.urihttps://hdl.handle.net/10371/13573-
dc.descriptionThesis(doctors)--서울대학교 대학원 :재료공학부,2008.2.eng
dc.format.extentxiv, 147 leaveseng
dc.language.isoeneng
dc.publisher서울대학교 대학원eng
dc.subjectPZTeng
dc.subjectPZTeng
dc.subject후막eng
dc.subjectThick-filmeng
dc.subject에어로졸 증착법eng
dc.subjectAerosol depositioneng
dc.subjectZreng
dc.subjectZreng
dc.subjectTi 비eng
dc.subjectTi ratioeng
dc.subject잔류 압축 응력eng
dc.subjectResidual compressive stresseng
dc.subject유기물eng
dc.subjectOrganic specieseng
dc.subject미러 액츄에이터eng
dc.subjectpiezoelectriceng
dc.subjectmirror actuatoreng
dc.titleFabrication of PZT-Based piezoelectric thick film by aerosol deposition method and its application to piezoelectric deviceseng
dc.title.alternative에어로졸 증착법을 이용한 PZT계 압전 후막의 제조 및 압전 소자로의 응용eng
dc.typeThesis-
dc.contributor.department재료공학부-
dc.description.degreeDoctoreng
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