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In-situ analysis of In(Ga)As layer growth by spectral reflectance : Spectral reflectance를 이용한 In(Ga)As층 성장의 실시간 분석

DC Field Value Language
dc.contributor.advisor윤의준-
dc.contributor.author안응진-
dc.date.accessioned2009-11-18T22:47:51Z-
dc.date.available2009-11-18T22:47:51Z-
dc.date.copyright2007.-
dc.date.issued2007-
dc.identifier.urihttp://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000042914eng
dc.identifier.urihttps://hdl.handle.net/10371/13584-
dc.description학위논문(박사) --서울대학교 대학원 :재료공학부,2007.eng
dc.format.extentix, 111 장eng
dc.language.isoeneng
dc.publisher서울대학교 대학원eng
dc.subject유기금속 화학기상 증착법 (MOCVD)eng
dc.subjectMetalorganic chemical vapor deposition (MOCVD)eng
dc.subjectspectral reflectance (SR)eng
dc.subjectspectral reflectance (SR)eng
dc.subject실시간모니터링eng
dc.subjectin-situ monitoringeng
dc.subjectInAseng
dc.subjectepitaxial growtheng
dc.subjectInGaAseng
dc.subjectInAseng
dc.subjectGaAseng
dc.subjectInGaAseng
dc.subjectInPeng
dc.subjectGaAseng
dc.subjectZnOeng
dc.subjectInPeng
dc.subjectmultibeam optical stress sensor (MOSS)eng
dc.subjectZnOeng
dc.subject자발형성 양자점 (SAQD)eng
dc.subjectsurface reconstructioneng
dc.subjectInPeng
dc.subjectsurface reactioneng
dc.subjectInGaAseng
dc.subjectmultibeam optical stress sensor (MOSS)eng
dc.subjectGaAseng
dc.subjectself-assembled quantum dots (SAQD)eng
dc.subjectInPeng
dc.subjectphotoluminescence (PL)eng
dc.subjectZnOeng
dc.subjectatomic force microscopy (AFM)eng
dc.subject표면 reconstructioneng
dc.subjectreflectance anisotropy spectroscopy (RAS)eng
dc.subject표면 반응eng
dc.subjectsurface photoabsorption (SPA)eng
dc.subject다중빔광학 응력측정기 (MOSS)eng
dc.subject원자전자현미경 (AFM)eng
dc.subjectreflectance anisotropy spectroscopy (RAS)eng
dc.subjectsurface photoabsorption (SPA)eng
dc.titleIn-situ analysis of In(Ga)As layer growth by spectral reflectanceeng
dc.title.alternativeSpectral reflectance를 이용한 In(Ga)As층 성장의 실시간 분석eng
dc.typeThesis-
dc.contributor.department재료공학부-
dc.description.degreeDoctoreng
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