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MILC TFT에서 게이트 절연막과 비정질 실리콘 계면의 효과에 관한 연구

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Authors

김수만

Advisor
주승기
Issue Date
2006
Publisher
서울대학교 대학원
Keywords
금속유도측면결정화MILC게이트절연막Gate Insulator누설전류Vth ( Threshold voltage)Leakage Current
Description
학위논문(석사)--서울대학교 대학원 :재료공학부,2006.
Language
Korean
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000047494

https://hdl.handle.net/10371/14887
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