Publications
Detailed Information
(The)Formation and memory effects of Ru nanocrystals formed by plasma-enhanced atomic layer depostion : 플라즈마 원자층 증착법을 이용한 Ru nanocrystal의 형성과 기억 효과에 대한 연구
Cited 0 time in
Web of Science
Cited 0 time in Scopus
- Authors
- Advisor
- 김기범
- Issue Date
- 2006
- Publisher
- 서울대학교 대학원
- Keywords
- nanocrystal ; nanocrystal ; 일함수 ; work function ; 플라즈마 원자층 증착법 ; plasma enhanced atomic layer deposition (PEALD) ; Ru ; Ru ; C-V 측정 ; C-V characteristics ; 평탄 전압 ; flatband voltage ; 전하 유지 ; retention
- Description
- Thesis(master`s) --서울대학교 대학원 :재료공학부,2006.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000049245
https://hdl.handle.net/10371/15036
- Files in This Item:
- There are no files associated with this item.
Item View & Download Count
Items in S-Space are protected by copyright, with all rights reserved, unless otherwise indicated.