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Study on characterization of the nanoscale patterns fabricated by thermal nanoimprint lithographic process
나노 임프린트 공정으로 구현된 나노패턴의 특성에 관한 연구

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Authors
이동언
Advisor
이우일
Major
기계항공공학부
Issue Date
2011-08
Publisher
서울대학교 대학원
Keywords
나노임프린트 리소그래피점착력고분자원자현미경미세구조물NILAdhesionPolymerAFMPull-off ForceNano-patternNano Technology
Description
학위논문 (박사)-- 서울대학교 대학원 : 기계항공공학부, 2011.8. 이우일.
Language
eng
URI
http://hdl.handle.net/10371/158480

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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Mechanical Aerospace Engineering (기계항공공학부)Theses (Ph.D. / Sc.D._기계항공공학부)
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