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College of Engineering/Engineering Practice School (공과대학/대학원)
Dept. of Mechanical Aerospace Engineering (기계항공공학부)
Theses (Ph.D. / Sc.D._기계항공공학부)
Study on characterization of the nanoscale patterns fabricated by thermal nanoimprint lithographic process : 나노 임프린트 공정으로 구현된 나노패턴의 특성에 관한 연구
- Issue Date
- 2011-08
- Publisher
- 서울대학교 대학원
- Keywords
- 나노임프린트 리소그래피 ; 점착력 ; 고분자 ; 원자현미경 ; 미세구조물 ; NIL ; Adhesion ; Polymer ; AFM ; Pull-off Force ; Nano-pattern ; Nano Technology
- Description
- 학위논문 (박사)-- 서울대학교 대학원 : 기계항공공학부, 2011.8. 이우일.
- Language
- eng
- URI
- https://hdl.handle.net/10371/158480
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000031030
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