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(A) study on the utilization of surface treatment for anisotropic wrinkle patterning and align stiction in imprint lithography process : 표면처리 효과를 이용한 자기조립형 대면적 미세패턴 형성과 임프린트 공정에서의 정렬마찰 저감에 대한 연구

DC Field Value Language
dc.contributor.advisor이우일-
dc.contributor.author강석환-
dc.date.accessioned2019-07-10T03:18:36Z-
dc.date.available2019-07-10T03:18:36Z-
dc.date.issued2011-02-
dc.identifier.other000000028980-
dc.identifier.urihttps://hdl.handle.net/10371/158503-
dc.identifier.urihttp://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000028980ko_KR
dc.description학위논문 (박사)-- 서울대학교 대학원 : 기계항공공학부, 2011.2. 이우일.-
dc.format.extentxiii, 119 p.-
dc.language.isoeng-
dc.publisher서울대학교 대학원-
dc.subject표면처리-
dc.subject플라즈마-
dc.subject액정폴리머-
dc.subject이방성 주름-
dc.subject임프린트 리소그래피-
dc.subject정렬공정-
dc.subject표면장력.-
dc.subjectSurface treatment-
dc.subjectPlasma-
dc.subjectAnisotropy-
dc.subjectLiquid Crystalline Polymer (LCP)-
dc.subjectWrinkle-
dc.subjectImprint lithography-
dc.subjectSurface tension-
dc.subjectStiction-
dc.subjectCapillary adhesion.-
dc.title(A) study on the utilization of surface treatment for anisotropic wrinkle patterning and align stiction in imprint lithography process-
dc.title.alternative표면처리 효과를 이용한 자기조립형 대면적 미세패턴 형성과 임프린트 공정에서의 정렬마찰 저감에 대한 연구-
dc.typeThesis-
dc.typeDissertation-
dc.description.degreeDoctor-
dc.contributor.affiliation기계항공공학부-
dc.date.awarded2011-02-
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