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Effect of well-defined topographic patterns on the microdomain orientation of block copolymer thin films : 정렬된 패턴을 가진 기판이 블록공중합체 박막의 배향에 미치는 영향에 관한 연구
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- Authors
- Advisor
- 차국헌
- Major
- 화학생물공학부
- Issue Date
- 2011-08
- Publisher
- 서울대학교 대학원
- Keywords
- 블록공중합체 ; 자기조립 ; 전자빔 리소그래피 ; 박막 ; 배향 ; 유도자기조립 ; Block Copolymer ; Thin Film ; Atomic Image Projection E-beam Lithography ; E-beam Lithography ; Orientation ; Directed Self-Assembly
- Description
- 학위논문 (석사)-- 서울대학교 대학원 : 화학생물공학부, 2011.8. 차국헌.
- Language
- eng
- URI
- https://hdl.handle.net/10371/160239
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000031741
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