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Showing results 1 to 5 of 5

Issue Date	Title / Author(s) / Citation	File
2005	구리배선형성용 연마슬러리에 사용되는 부식방지제 및 공정 연구 이종원	link
2005-01	Effect of dispersant addition during ceria abrasive milling process on light point defect (LPD) formation after shallow trench isolation chemical mechanical polishing (STI-CMP) Kang, Hyun-Goo; Katoh, Takeo; Kim, Dae-Hyung; Paik, Ungyu; Park, Jea-Gun Japanese Journal of Applied Physics, Vol.44 No.1-7, pp.L238-L241	DOI
2006-06	Effect of calcination process on synthesis of ceria particles, and its influence on shallow trench isolation chemical mechanical planarization performance Kim, Dae-Hyeong; Kang, Hyun-Goo; Kim, Sang-Kyun; Paik, Ungyu; Park, Jea-Gun Japanese Journal of Applied Physics, Vol.45 No.6A, pp.4893-4897	DOI
2011-08	Study on internal structure and properties of slurries for lithium secondary batteries 조기연	link
2020	Study on the reverse selective CMP on silicon based materials and post CMP Co surface for the contact formation in next generation Flash NAND Device 배기호	view file link