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Issue Date Title / Author(s) / CitationFile
2006
Dependence of non-Prestonian behavior of ceria slurry with anionic surfactant on abrasive concentration and size in shallow trench isolation chemical mechanical polishing

Kang, Hyun-Goo; Kim, Dae-Hyeong; Katoh, Takeo; Kim, Sung-Jun; Paik, Ungyu; Park, Jea-Gun

Japanese Journal of Applied Physics, Vol.45 No.5A, pp.3896-3904

DOI
1
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