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Issue Date Title / Author(s) / CitationFile
2005
Agglomerated large particles under various slurry preparation conditions and their influence on shallow trench isolation chemical mechanical polishing

Kim, Dae-Hyeong; Kang, Hyun-Goo; Kim, Sang-Kyun; Paik, Ungyu; Park, Jea-Gun

Japanese Journal of Applied Physics, Vol.44 No.11, pp.7770-7776

DOI
1
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