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열필라멘트법을 이용한 저온 실리콘 화학 기상 증착 공정 중 발생하는 전하 운반체의 거동 : Generation of electrically charged carriers during low temperature deposition of Si films by hot wire chemical vapor deposition
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- Authors
- Advisor
- 황농문
- Issue Date
- 2009
- Publisher
- 서울대학교 대학원
- Keywords
- 저온 다결정 실리콘 ; 하전된 나노입자 ; 열필라멘트 화학기상증착 ; FE-SEM ; Raman spectroscopy
- Description
- 학위논문(석사) --서울대학교 대학원 :재료공학부, 2009.2.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000036854
https://hdl.handle.net/10371/16629
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