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Tailored Graphene Micropatterns by Wafer-Scale Direct Transfer for Flexible Chemical Sensor Platform

Cited 4 time in Web of Science Cited 3 time in Scopus
Authors
Kim, Yeonhoo; Kim, Taehoon; Lee, Jinwoo; Choi, Yong Seok; Moon, Joonhee; Park, Seo Yun; Lee, Tae Hyung; Park, Hoon Kee; Lee, Sol A; Kwon, Min Sang; Byun, Hyung-Gi; Lee, Jong-Heun; Lee, Myoung-Gyu; Hong, Byung Hee; Jang, Ho Won
Issue Date
2020-01
Citation
Advanced Materials, p. 2004827
Keywords
2D materialschemical sensor arraysfinite element simulationsgraphenemicroscale patterning
Abstract
2D materials, such as graphene, exhibit great potential as functional materials for numerous novel applications due to their excellent properties. The grafting of conventional micropatterning techniques on new types of electronic devices is required to fully utilize the unique nature of graphene. However, the conventional lithography and polymer-supported transfer methods often induce the contamination and damage of the graphene surface due to polymer residues and harsh wet-transfer conditions. Herein, a novel strategy to obtain micropatterned graphene on polymer substrates using a direct curing process is demonstrated. Employing this method, entirely flexible, transparent, well-defined self-activated graphene sensor arrays, capable of gas discrimination without external heating, are fabricated on 4 in. wafer-scale substrates. Finite element method simulations show the potential of this patterning technique to maximize the performance of the sensor devices when the active channels of the 2D material are suspended and nanoscaled. This study contributes considerably to the development of flexible functional electronic devices based on 2D materials.
ISSN
0935-9648
URI
https://hdl.handle.net/10371/172151
DOI
https://doi.org/10.1002/adma.202004827
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College of Natural Sciences (자연과학대학)Dept. of Chemistry (화학부)Journal Papers (저널논문_화학부)
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