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Critical evaluation and thermodynamic optimization of the Si-N, Si-C, C-N and Si-C-N systems and its applications to high purity SiC production
Cited 1 time in
Web of Science
Cited 1 time in Scopus
- Authors
- Issue Date
- 2022-09
- Publisher
- Elsevier BV
- Citation
- Journal of the European Ceramic Society, Vol.42 No.12, pp.4793-4809
- Abstract
- © 2022 Elsevier LtdThermodynamic optimization of the Si-N, Si-C, C-N and Si-C-N systems were performed using the CALculation of PHAse Diagrams (CALPHAD) method based on critical evaluation of all available experimental data. The liquid and solid solutions within the Si-C-N system were described using the Modified Quasichemical Model and Compound Energy Formalism, respectively. The Gibbs energies of β-Si3N4 and β-SiC were carefully optimized to resolve inconsistencies among existing thermodynamic properties and phase equilibria data. The solubilities of C and N in both solid and liquid Si solutions were critically optimized. Besides, the solubility of N in β-SiC to form a narrow homogeneity range of β-Si(C,N) solid solution is considered for the first time in the present thermodynamic modeling. Based on the present thermodynamic database, experimentally unexplored phase diagrams and thermodynamic properties within the Si-C-N alloys were predicted. As an application of the database, the influences of various operation conditions on high purity SiC production using sublimation process were calculated.
- ISSN
- 0955-2219
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