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Mutually-Actuated-Nano-Electromechanical (MANEM) Memory Switches for Scalability Improvement : Mutually-Actuated-Nano-Electromechanical (MA-NEM) Memory Switches for Scalability Improvement
Cited 1 time in
Web of Science
Cited 2 time in Scopus
- Authors
- Issue Date
- 2017-04
- Publisher
- 대한전자공학회
- Citation
- JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE, Vol.17 No.2, pp.199-203
- Abstract
- Mutually-actuated-nano-electromechanical (MA-NEM) memory switches are proposed for scalability improvement. While conventional NEM memory switches have fixed electrode lines, the proposed MA-NEM memory switches have mutually-actuated cantilever-like electrode lines. Thus, MA-NEM memory switches show smaller deformations of beams in switching. This unique feature of MA-NEM memory switches allows aggressive reduction of the beam length while maintaining nonvolatile property. Also, the scalability of MA-NEM memory switches is confirmed by using finite-element (FE) simulations. MA-NEM memory switches can be promising solutions for reconfigurable logic (RL) circuits.
- ISSN
- 1598-1657
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