Advanced Inkjet Technology for 3D Micro-metal Structure Fabrication

Abstract

Inkjet printing of functional materials is the key technology toward ultra-low-cost, large-area electronics. Low-temperature 3D micro-metal structure fabrication was developed by direct inkjet printing of metal nano-particles (NPs) as a versatile, direct 3D metal structuring approach representing an alternative to conventional vacuum deposition and photolithographic methods. Metal NP ink was inkjet printed to exploit the large melting temperature drop of the nano-material and the ease of the NP ink formulation. Parametric studies on the basic conditions for stable 3D inkjet printing of NP ink will be explained. Furthermore, diverse 3D metal micro-structures, including micro-metal pillar arrays, helical, zigzag, and micro-bridges were demonstrated and electrical characterization will be given as examples. Since the process requires low temperature, it carries substantial potential for fabrication of electronics on a plastic substrate.