Multifunctional nanowire array for chemical sensing and manipulation

Abstract

We have developed high density, integrated nanowire array devices that can be used for multiple purposes - chemical sensing and manipulation of chemical reactions at nanoscale. High density silicon nanowire (SiNW) sensor array allows electrical addressing of each individual nanowire for localized sensing and chemical reaction control at high spatial resolution. At the low voltage mode (50-100mV), they can be used for the real-time chemical detection (pH level, alkali metal ions, and protein / DNA molecules). Also, at high voltage mode (3-30V), electrical potential across SiNWs creates highly localized Joule heating for the nanoheater applications such as thermal ablation and crosslinking of polymeric materials and localized chemical synthesis of one dimensional nanostructures. ©2009 IEEE.