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유도결합 플라즈마 스퍼터링에 의한 저온코팅공정에 관한 연구

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Authors

나형돈

Advisor
이정중
Issue Date
2002
Publisher
서울대학교 대학원
Description
학위논문(석사)--서울대학교 대학원 :재료공학부,2002.
Language
Korean
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000061384

https://hdl.handle.net/10371/30381
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