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(111) 실리콘의 습식식각 특성과 그 응용
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- Authors
- Advisor
- 조동일
- Issue Date
- 2001
- Publisher
- 서울대학교 대학원
- Keywords
- (111) 실리콘 ; (111) silicon ; {431} 면 ; {431} plane ; 미세 전기기계 시스템 ; microelectromechanical systems(MEMS) ; 비등방성 식각 ; anisotropic etch ; 웨곤 휠 ; wagon wheel ; AFM ; TMAH(tetramethyl ammonium hydroxide) ; SPM ; TMAH
- Description
- 학위논문(석사)--서울대학교 대학원 :전기.컴퓨터공학부,2001.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000065161
https://hdl.handle.net/10371/31140
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