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Sidewall 구조를 이용한 극미세 다중 선폭 구현
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 박병국 | - |
| dc.contributor.author | 정경훈 | - |
| dc.date.accessioned | 2010-01-15T04:39:02Z | - |
| dc.date.available | 2010-01-15T04:39:02Z | - |
| dc.date.copyright | 2002. | - |
| dc.date.issued | 2002 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000061810 | kor |
| dc.identifier.uri | https://hdl.handle.net/10371/31195 | - |
| dc.description | 학위논문(석사)--서울대학교 대학원 :전기·컴퓨터공학부,2002. | ko |
| dc.format.extent | 57, 17 장 | ko |
| dc.language.iso | ko | ko |
| dc.publisher | 서울대학교 대학원 | ko |
| dc.title | Sidewall 구조를 이용한 극미세 다중 선폭 구현 | ko |
| dc.type | Thesis | - |
| dc.contributor.department | 전기·컴퓨터공학부 | - |
| dc.description.degree | Master | ko |
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