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A Study on uniformity improvement of plasma density in large-area helicon plasma source : 대면적 헬리콘 플라즈마 원에서 플라즈마 밀도의 균일성 향상에 관한 연구
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- Authors
- Advisor
- 황용석
- Issue Date
- 2001
- Publisher
- 서울대학교 대학원
- Description
- Thesis (master`s)--서울대학교 대학원 :원자핵공학과,2001.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000064372
https://hdl.handle.net/10371/33222
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