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College of Engineering/Engineering Practice School (공과대학/대학원)
Dept. of Energy Systems Engineering (에너지시스템공학부)
Nuclear Engineering (원자핵공학전공)
Theses (Master's Degree_원자핵공학과)
Development of large-area, multi-helicon plasma source for TFT-LCD processing : 다중 헬리콘 방전을 이용한 TFT-LCD 공정용 대면적 플라즈마원 개발
- Authors
- Advisor
- 황용석
- Issue Date
- 2002
- Publisher
- 서울대학교 대학원
- Description
- Thesis (master`s)--서울대학교 대학원 :원자핵공학과,2002.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000061868
https://hdl.handle.net/10371/33861
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