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정전기력 가속에 의한 Mirror 소자의 전기적, 광학적 분석을 통한 미세역학적 신뢰성 평가 : Evaluation of reliability for micro mirror device through applying accelerated electrostatic force
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 권동일 | - |
| dc.contributor.author | 박병우 | - |
| dc.date.accessioned | 2010-01-16T13:54:29Z | - |
| dc.date.available | 2010-01-16T13:54:29Z | - |
| dc.date.copyright | 1999. | - |
| dc.date.issued | 1999 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000074132 | kor |
| dc.identifier.uri | https://hdl.handle.net/10371/34585 | - |
| dc.description | 학위논문(박사)--서울대학교 대학원 :금속공학과,1999. | ko |
| dc.format.extent | x, 122 장 | ko |
| dc.language.iso | ko | ko |
| dc.publisher | 서울대학교 대학원 | ko |
| dc.subject | 마이크로머시닝 | ko |
| dc.subject | Mirror Devices | ko |
| dc.subject | 환형미러소자 | ko |
| dc.subject | Fatigue effect | ko |
| dc.subject | 정전기력 | ko |
| dc.subject | Accelerated condition | ko |
| dc.subject | 가속실험 | ko |
| dc.subject | DVD/CD Module | ko |
| dc.subject | C-V 측정 | ko |
| dc.subject | folded region | ko |
| dc.title | 정전기력 가속에 의한 Mirror 소자의 전기적, 광학적 분석을 통한 미세역학적 신뢰성 평가 | ko |
| dc.title.alternative | Evaluation of reliability for micro mirror device through applying accelerated electrostatic force | ko |
| dc.type | Thesis | - |
| dc.contributor.department | 금속공학과 | - |
| dc.description.degree | Doctor | ko |
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