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Material characterizations and microfailure properties of thin film structure through design and fabrication of electrostatically actuated test device : 미세평가소자 설계제작을 통한 마이크로시스템 응용 박막구조물의 미소물성 및 파손특성 평가
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 권동일 | - |
| dc.contributor.author | 이세호 | - |
| dc.date.accessioned | 2010-01-17T02:13:19Z | - |
| dc.date.available | 2010-01-17T02:13:19Z | - |
| dc.date.copyright | 2002. | - |
| dc.date.issued | 2002 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000060864 | eng |
| dc.identifier.uri | https://hdl.handle.net/10371/35429 | - |
| dc.description | Thesis (doctoral)--서울대학교 대학원 :재료공학부,2002. | en |
| dc.format.extent | xvii, 231 leaves | en |
| dc.language.iso | en | en |
| dc.publisher | 서울대학교 대학원 | en |
| dc.subject | MEMS raliability | en |
| dc.subject | 파손사이클 | en |
| dc.subject | design of the test device | en |
| dc.subject | 노치효과 | en |
| dc.subject | semiconductor and micromachining process | en |
| dc.subject | 파손가속인자 | en |
| dc.subject | Al and Si film | en |
| dc.subject | 파손수명 | en |
| dc.subject | notch effect | en |
| dc.subject | 항복강도 | en |
| dc.title | Material characterizations and microfailure properties of thin film structure through design and fabrication of electrostatically actuated test device | en |
| dc.title.alternative | 미세평가소자 설계제작을 통한 마이크로시스템 응용 박막구조물의 미소물성 및 파손특성 평가 | - |
| dc.type | Thesis | - |
| dc.contributor.department | 재료공학부 | - |
| dc.description.degree | Doctor | en |
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