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ZnO 압전박막을 이용한 박막형 공진기소자의 제조 : Fabrication of film bulk acoustic resonator devices using piezoelectric ZnO films

DC Field Value Language
dc.contributor.advisor김형준-
dc.contributor.author이재빈-
dc.date.accessioned2010-01-17T02:34:25Z-
dc.date.available2010-01-17T02:34:25Z-
dc.date.copyright2001.-
dc.date.issued2001-
dc.identifier.urihttp://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000066364kor
dc.identifier.urihttps://hdl.handle.net/10371/35504-
dc.description학위논문(박사)--서울대학교 대학원 :재료공학부,2001.ko
dc.format.extentxv, 199 p.ko
dc.language.isokoko
dc.publisher서울대학교 대학원ko
dc.subjectFBARko
dc.subject박막형공진기ko
dc.subjectreflectorko
dc.subject반사층ko
dc.subjectZnOko
dc.subject산화아연ko
dc.subjectorientationko
dc.subject우선배향성ko
dc.subjectacousticko
dc.subject음향파ko
dc.titleZnO 압전박막을 이용한 박막형 공진기소자의 제조ko
dc.title.alternativeFabrication of film bulk acoustic resonator devices using piezoelectric ZnO filmsko
dc.typeThesis-
dc.contributor.department재료공학부-
dc.description.degreeDoctorko
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