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전기도금법으로 성형된 고종횡비 MEMS부품의 물리적 특성에 관한 연구 : (A)Study on the uniformity improvement of Ni alloy plating for high strength MEMS structure with high-aspect ratio
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- Authors
- Advisor
- 한동철
- Issue Date
- 2008
- Publisher
- 서울대학교 대학원
- Keywords
- 니켈합금 ; Nickel alloy ; 미소 전자 기계 시스템 ; Micro-electromechanical systems ; 도금균일성 ; Plating uniformity ; 고종횡비 ; High-aspect ratio ; 고강도 ; High strength ; 전기도금 ; Electroplating
- Description
- 학위논문(박사) --서울대학교 대학원 :기계항공공학부, 2008.8.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000041562
https://hdl.handle.net/10371/41402
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