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전기도금법으로 성형된 고종횡비 MEMS부품의 물리적 특성에 관한 연구
(A)Study on the uniformity improvement of Ni alloy plating for high strength MEMS structure with high-aspect ratio

DC Field Value Language
dc.contributor.advisor한동철-
dc.contributor.author이승훈-
dc.date.accessioned2010-01-21T15:57:34Z-
dc.date.available2010-01-21T15:57:34Z-
dc.date.copyright2008.-
dc.date.issued2008-
dc.identifier.urihttp://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000041562kog
dc.identifier.urihttps://hdl.handle.net/10371/41402-
dc.description학위논문(박사) --서울대학교 대학원 :기계항공공학부, 2008.8.ko
dc.format.extentviii, 107 장ko
dc.language.isokoko
dc.publisher서울대학교 대학원ko
dc.subject니켈합금ko
dc.subjectNickel alloyko
dc.subject미소 전자 기계 시스템ko
dc.subjectMicro-electromechanical systemsko
dc.subject도금균일성ko
dc.subjectPlating uniformityko
dc.subject고종횡비ko
dc.subjectHigh-aspect ratioko
dc.subject고강도ko
dc.subjectHigh strengthko
dc.subject전기도금ko
dc.subjectElectroplatingko
dc.title전기도금법으로 성형된 고종횡비 MEMS부품의 물리적 특성에 관한 연구ko
dc.title.alternative(A)Study on the uniformity improvement of Ni alloy plating for high strength MEMS structure with high-aspect ratioko
dc.typeThesis-
dc.contributor.department기계항공공학부-
dc.description.degreeDoctorko
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Mechanical Aerospace Engineering (기계항공공학부)Theses (Ph.D. / Sc.D._기계항공공학부)
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