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College of Engineering/Engineering Practice School (공과대학/대학원)
Dept. of Mechanical Aerospace Engineering (기계항공공학부)
Theses (Ph.D. / Sc.D._기계항공공학부)
전기도금법으로 성형된 고종횡비 MEMS부품의 물리적 특성에 관한 연구
(A)Study on the uniformity improvement of Ni alloy plating for high strength MEMS structure with high-aspect ratio
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 한동철 | - |
| dc.contributor.author | 이승훈 | - |
| dc.date.accessioned | 2010-01-21T15:57:34Z | - |
| dc.date.available | 2010-01-21T15:57:34Z | - |
| dc.date.copyright | 2008. | - |
| dc.date.issued | 2008 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000041562 | kog |
| dc.identifier.uri | https://hdl.handle.net/10371/41402 | - |
| dc.description | 학위논문(박사) --서울대학교 대학원 :기계항공공학부, 2008.8. | ko |
| dc.format.extent | viii, 107 장 | ko |
| dc.language.iso | ko | ko |
| dc.publisher | 서울대학교 대학원 | ko |
| dc.subject | 니켈합금 | ko |
| dc.subject | Nickel alloy | ko |
| dc.subject | 미소 전자 기계 시스템 | ko |
| dc.subject | Micro-electromechanical systems | ko |
| dc.subject | 도금균일성 | ko |
| dc.subject | Plating uniformity | ko |
| dc.subject | 고종횡비 | ko |
| dc.subject | High-aspect ratio | ko |
| dc.subject | 고강도 | ko |
| dc.subject | High strength | ko |
| dc.subject | 전기도금 | ko |
| dc.subject | Electroplating | ko |
| dc.title | 전기도금법으로 성형된 고종횡비 MEMS부품의 물리적 특성에 관한 연구 | ko |
| dc.title.alternative | (A)Study on the uniformity improvement of Ni alloy plating for high strength MEMS structure with high-aspect ratio | ko |
| dc.type | Thesis | - |
| dc.contributor.department | 기계항공공학부 | - |
| dc.description.degree | Doctor | ko |
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- College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Mechanical Aerospace Engineering (기계항공공학부)Theses (Ph.D. / Sc.D._기계항공공학부)
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