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나노 임프린트 리소그래피 공정의 해석적 모델링 및 점탄성 유한요소해석 : Analytical modeling and viscoelastic finite element analysis of nanoimprint lithography process

DC Field Value Language
dc.contributor.advisor신효철-
dc.contributor.author김남웅-
dc.date.accessioned2010-01-21T15:57:53Z-
dc.date.available2010-01-21T15:57:53Z-
dc.date.copyright2008-
dc.date.issued2008-
dc.identifier.other000000041555-
dc.identifier.urihttp://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000041555-
dc.description학위논문(박사)--서울대학교 대학원 :기계항공공학부,2008.8.-
dc.format.extentix, 121 장-
dc.language.isoko-
dc.publisher서울대학교 대학원-
dc.subject나노임프린트 리소그래피-
dc.subjectNanoimprint Lithography-
dc.subject스퀴즈 유동-
dc.subjectSqueeze Flow-
dc.subject점탄성-
dc.subjectViscoelastic behavior-
dc.subject유한요소법-
dc.subjectFinite Element Method-
dc.subject응력완화-
dc.subjectStress Relaxation-
dc.subject유리천이온도-
dc.subjectGlass Transition Temperature-
dc.title나노 임프린트 리소그래피 공정의 해석적 모델링 및 점탄성 유한요소해석-
dc.title.alternativeAnalytical modeling and viscoelastic finite element analysis of nanoimprint lithography process-
dc.typeThesis-
dc.contributor.department기계항공공학부-
dc.description.degree학위논문(박사) ---
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