Publications
Detailed Information
나노 임프린트 리소그래피 공정의 해석적 모델링 및 점탄성 유한요소해석 : Analytical modeling and viscoelastic finite element analysis of nanoimprint lithography process
DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | 신효철 | - |
dc.contributor.author | 김남웅 | - |
dc.date.accessioned | 2010-01-21T15:57:53Z | - |
dc.date.available | 2010-01-21T15:57:53Z | - |
dc.date.copyright | 2008 | - |
dc.date.issued | 2008 | - |
dc.identifier.other | 000000041555 | - |
dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000041555 | - |
dc.description | 학위논문(박사)--서울대학교 대학원 :기계항공공학부,2008.8. | - |
dc.format.extent | ix, 121 장 | - |
dc.language.iso | ko | - |
dc.publisher | 서울대학교 대학원 | - |
dc.subject | 나노임프린트 리소그래피 | - |
dc.subject | Nanoimprint Lithography | - |
dc.subject | 스퀴즈 유동 | - |
dc.subject | Squeeze Flow | - |
dc.subject | 점탄성 | - |
dc.subject | Viscoelastic behavior | - |
dc.subject | 유한요소법 | - |
dc.subject | Finite Element Method | - |
dc.subject | 응력완화 | - |
dc.subject | Stress Relaxation | - |
dc.subject | 유리천이온도 | - |
dc.subject | Glass Transition Temperature | - |
dc.title | 나노 임프린트 리소그래피 공정의 해석적 모델링 및 점탄성 유한요소해석 | - |
dc.title.alternative | Analytical modeling and viscoelastic finite element analysis of nanoimprint lithography process | - |
dc.type | Thesis | - |
dc.contributor.department | 기계항공공학부 | - |
dc.description.degree | 학위논문(박사) -- | - |
- Appears in Collections:
- Files in This Item:
- There are no files associated with this item.
Item View & Download Count
Items in S-Space are protected by copyright, with all rights reserved, unless otherwise indicated.