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플라즈마 전처리와 Si interface control layer를 이용한 GaAsSi₃N₄계면상태 개선 및 GaAs MISFET의 구현
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- Authors
- Advisor
- 서광석
- Issue Date
- 2000
- Publisher
- 서울대학교 대학원
- Description
- 학위논문(석사)--서울대학교 대학원 :전기공학부,2000.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000068190
https://hdl.handle.net/10371/42631
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