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Nanoporous organosilicate thin films for low dielectric

DC Field Value Language
dc.contributor.advisor차국헌-
dc.contributor.author최연승-
dc.date.accessioned2010-01-25T07:25:18Z-
dc.date.available2010-01-25T07:25:18Z-
dc.date.copyright2004.-
dc.date.issued2004-
dc.identifier.urihttp://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000054506eng
dc.identifier.urihttps://hdl.handle.net/10371/43563-
dc.descriptionThesis (master`s)--서울대학교 대학원 :협동과정 나노과학기술전공,2004.en
dc.format.extentix, 44 leavesen
dc.language.isoenen
dc.publisher서울대학교 대학원en
dc.subject유기실리케이트en
dc.subjectOrganosilicateen
dc.subject저유전물질en
dc.subjectLow-ken
dc.subject유기/무기 혼성en
dc.subjectOrganic/inorganic hybriden
dc.subject나노기공en
dc.subjectNanoporous thin filmen
dc.subject상용성en
dc.subjectMiscibilityen
dc.subject기공 붕괴en
dc.subjectPore collapseen
dc.subject유연성en
dc.subjectFlexibilityen
dc.subject친수성en
dc.subjectHydrophilicityen
dc.titleNanoporous organosilicate thin films for low dielectricen
dc.typeThesis-
dc.contributor.department협동과정 나노과학기술전공-
dc.description.degreeMasteren
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College of Engineering/Engineering Practice School (공과대학/대학원)Nano-Science and Technology (협동과정 나노과학·기술전공)Theses (Master's Degree_협동과정 나노과학·기술전공)
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