Nanoporous organosilicate thin films for low dielectric

서울대학교 중앙도서관

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Nanoporous organosilicate thin films for low dielectric

DC Field	Value	Language
dc.contributor.advisor	차국헌	-
dc.contributor.author	최연승	-
dc.date.accessioned	2010-01-25T07:25:18Z	-
dc.date.available	2010-01-25T07:25:18Z	-
dc.date.copyright	2004.	-
dc.date.issued	2004	-
dc.identifier.uri	http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000054506	eng
dc.identifier.uri	https://hdl.handle.net/10371/43563	-
dc.description	Thesis (master`s)--서울대학교 대학원 :협동과정 나노과학기술전공,2004.	en
dc.format.extent	ix, 44 leaves	en
dc.language.iso	en	en
dc.publisher	서울대학교 대학원	en
dc.subject	유기실리케이트	en
dc.subject	Organosilicate	en
dc.subject	저유전물질	en
dc.subject	Low-k	en
dc.subject	유기/무기 혼성	en
dc.subject	Organic/inorganic hybrid	en
dc.subject	나노기공	en
dc.subject	Nanoporous thin film	en
dc.subject	상용성	en
dc.subject	Miscibility	en
dc.subject	기공 붕괴	en
dc.subject	Pore collapse	en
dc.subject	유연성	en
dc.subject	Flexibility	en
dc.subject	친수성	en
dc.subject	Hydrophilicity	en
dc.title	Nanoporous organosilicate thin films for low dielectric	en
dc.type	Thesis	-
dc.contributor.department	협동과정 나노과학기술전공	-
dc.description.degree	Master	en

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