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Nanoporous organosilicate thin films for low dielectric
DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | 차국헌 | - |
dc.contributor.author | 최연승 | - |
dc.date.accessioned | 2010-01-25T07:25:18Z | - |
dc.date.available | 2010-01-25T07:25:18Z | - |
dc.date.copyright | 2004. | - |
dc.date.issued | 2004 | - |
dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000054506 | eng |
dc.identifier.uri | https://hdl.handle.net/10371/43563 | - |
dc.description | Thesis (master`s)--서울대학교 대학원 :협동과정 나노과학기술전공,2004. | en |
dc.format.extent | ix, 44 leaves | en |
dc.language.iso | en | en |
dc.publisher | 서울대학교 대학원 | en |
dc.subject | 유기실리케이트 | en |
dc.subject | Organosilicate | en |
dc.subject | 저유전물질 | en |
dc.subject | Low-k | en |
dc.subject | 유기/무기 혼성 | en |
dc.subject | Organic/inorganic hybrid | en |
dc.subject | 나노기공 | en |
dc.subject | Nanoporous thin film | en |
dc.subject | 상용성 | en |
dc.subject | Miscibility | en |
dc.subject | 기공 붕괴 | en |
dc.subject | Pore collapse | en |
dc.subject | 유연성 | en |
dc.subject | Flexibility | en |
dc.subject | 친수성 | en |
dc.subject | Hydrophilicity | en |
dc.title | Nanoporous organosilicate thin films for low dielectric | en |
dc.type | Thesis | - |
dc.contributor.department | 협동과정 나노과학기술전공 | - |
dc.description.degree | Master | en |
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