Control of the negative stress gradient and improvement of properties of titanium microstructures using ion implantation

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Control of the negative stress gradient and improvement of properties of titanium microstructures using ion implantation

DC Field	Value	Language
dc.contributor.advisor	김용협	-
dc.contributor.author	박상현	-
dc.date.accessioned	2010-01-26T03:53:25Z	-
dc.date.available	2010-01-26T03:53:25Z	-
dc.date.copyright	2005.	-
dc.date.issued	2005	-
dc.identifier.uri	http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000052821	eng
dc.identifier.uri	https://hdl.handle.net/10371/44498	-
dc.description	Thesis(master`s)--서울대학교 대학원 :기계항공공학부,2005.	en
dc.format.extent	v, 41 leaves	en
dc.language.iso	en	en
dc.publisher	서울대학교 대학원	en
dc.subject	MEMS (미소전기기계시스템)	en
dc.subject	MEMS (Micro-electro-mechanical-system)	en
dc.subject	티타늄	en
dc.subject	titanium	en
dc.subject	이온주입	en
dc.subject	ion implantation	en
dc.subject	헬륨	en
dc.subject	helium	en
dc.subject	제논	en
dc.subject	xenon	en
dc.subject	응력구배	en
dc.subject	stress gradient	en
dc.subject	표면 거칠기	en
dc.subject	surface roughness	en
dc.subject	경도	en
dc.subject	hardness	en
dc.subject	탄성계수	en
dc.subject	elastic modulus	en
dc.subject	마모	en
dc.subject	tribology	en
dc.title	Control of the negative stress gradient and improvement of properties of titanium microstructures using ion implantation	en
dc.type	Thesis	-
dc.contributor.department	기계항공공학부	-
dc.description.degree	Master	en

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