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Development of soft imprint lithography and its application to nanoparticle patterning

DC Field Value Language
dc.contributor.advisor최만수-
dc.contributor.author박정한-
dc.date.accessioned2010-01-26T07:00:00Z-
dc.date.available2010-01-26T07:00:00Z-
dc.date.copyright2004.-
dc.date.issued2004-
dc.identifier.urihttp://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000055275eng
dc.identifier.urihttps://hdl.handle.net/10371/44823-
dc.descriptionThesis (master`s)--서울대학교 대학원 :기계항공공학부,2004.en
dc.format.extentviii, 74 leavesen
dc.language.isoenen
dc.publisher서울대학교 대학원en
dc.subject나노입자en
dc.subjectNanoparticleen
dc.subject나노패터닝en
dc.subjectNanopatterningen
dc.subject임프린트 리소그래피en
dc.subjectImprint lithographyen
dc.subject소프트리소그래피en
dc.subjectSoftlithographyen
dc.subject나노 구조물en
dc.subjectNanofabricationen
dc.subject입자 포집en
dc.subjectParticle depositionen
dc.subject비등방성 식각en
dc.subjectReactive ion etchingen
dc.subject증발 응축법en
dc.subjectEvaporation and condensation methoden
dc.titleDevelopment of soft imprint lithography and its application to nanoparticle patterningen
dc.typeThesis-
dc.contributor.department기계항공공학부-
dc.description.degreeMasteren
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Mechanical Aerospace Engineering (기계항공공학부)Theses (Master's Degree_기계항공공학부)
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