Development of soft imprint lithography and its application to nanoparticle patterning

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Development of soft imprint lithography and its application to nanoparticle patterning

DC Field	Value	Language
dc.contributor.advisor	최만수	-
dc.contributor.author	박정한	-
dc.date.accessioned	2010-01-26T07:00:00Z	-
dc.date.available	2010-01-26T07:00:00Z	-
dc.date.copyright	2004.	-
dc.date.issued	2004	-
dc.identifier.uri	http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000055275	eng
dc.identifier.uri	https://hdl.handle.net/10371/44823	-
dc.description	Thesis (master`s)--서울대학교 대학원 :기계항공공학부,2004.	en
dc.format.extent	viii, 74 leaves	en
dc.language.iso	en	en
dc.publisher	서울대학교 대학원	en
dc.subject	나노입자	en
dc.subject	Nanoparticle	en
dc.subject	나노패터닝	en
dc.subject	Nanopatterning	en
dc.subject	임프린트 리소그래피	en
dc.subject	Imprint lithography	en
dc.subject	소프트리소그래피	en
dc.subject	Softlithography	en
dc.subject	나노 구조물	en
dc.subject	Nanofabrication	en
dc.subject	입자 포집	en
dc.subject	Particle deposition	en
dc.subject	비등방성 식각	en
dc.subject	Reactive ion etching	en
dc.subject	증발 응축법	en
dc.subject	Evaporation and condensation method	en
dc.title	Development of soft imprint lithography and its application to nanoparticle patterning	en
dc.type	Thesis	-
dc.contributor.department	기계항공공학부	-
dc.description.degree	Master	en

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