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구동부에 주파수 튜닝 콤을 적용한 비연성 각속도 센서 설계

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Authors

김남국

Advisor
조동일
Issue Date
2008
Publisher
서울대학교 대학원
Keywords
멤스MEMS각속도센서Gyroscope음의 강성negative stiffness모델링comb modeling시뮬레이션측정
Description
학위논문(석사) --서울대학교 대학원 :전기. 컴퓨터공학부,2008.2
Language
Korean
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000041247

https://hdl.handle.net/10371/45169
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