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Ti 전구체의 기상 열분해가 유기 금속 화학 기상 증착에 의한 SrTiO3 박막 특성에 미치는 영향 : Effect of gas-phase thermal decomposition of ti precursors on the properties of SrTiO3 films formed by metal organic chemical vapor deposition
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- Authors
- Advisor
- 문상흡
- Issue Date
- 2005
- Publisher
- 서울대학교 대학원
- Keywords
- Ti(O-iPr)2(dpm)2 ; Ti(O-iPr)2(dpm)2 ; Ti(mpd)(dpm)2 ; Ti(mpd)(dpm)2 ; Ti(2meip)2 ; Ti(2meip)2 ; 열분해 ; Thermal decomposition ; 활성화 에너지 ; Activation energy ; SrTiO3 ; SrTiO3
- Description
- 학위논문(박사)--서울대학교 대학원 :응용화학부,2005.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000052294
https://hdl.handle.net/10371/45354
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