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Detailed Information
Isolation method for single crystal silicon MEMS with selective silicon-on-insulator structure : 선택적인 SOI 구조를 이용한 단결정실리콘 MEMS의 절연 방법
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- Authors
- Advisor
- 조동일
- Issue Date
- 2004
- Publisher
- 서울대학교 대학원
- Keywords
- selective SOI ; 선택적 SOI ; Footing Phenomenon in SOI ; 푸팅 현상 ; Residual Stress ; 잔류 응력 ; Gyroscope ; 자이로스코프
- Description
- Thesis (doctoral)--서울대학교 대학원 :전기·컴퓨터공학부,2004.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000055547
https://hdl.handle.net/10371/45473
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