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Isolation method for single crystal silicon MEMS with selective silicon-on-insulator structure
선택적인 SOI 구조를 이용한 단결정실리콘 MEMS의 절연 방법

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Authors
박상준
Advisor
조동일
Issue Date
2004
Publisher
서울대학교 대학원
Keywords
selective SOI선택적 SOIFooting Phenomenon in SOI푸팅 현상Residual Stress잔류 응력Gyroscope자이로스코프
Description
Thesis (doctoral)--서울대학교 대학원 :전기·컴퓨터공학부,2004.
Language
English
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000055547

http://hdl.handle.net/10371/45473
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Electrical and Computer Engineering (전기·정보공학부)Theses (Ph.D. / Sc.D._전기·정보공학부)
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