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Design and fabrication of 30nm self-aligned FinFET : 30nm 자기 정렬형 FinFET 설계 및 제작
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 박병국 | - |
| dc.contributor.author | 우동수 | - |
| dc.date.accessioned | 2010-01-27T23:12:52Z | - |
| dc.date.available | 2010-01-27T23:12:52Z | - |
| dc.date.copyright | 2004. | - |
| dc.date.issued | 2004 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000055116 | eng |
| dc.identifier.uri | https://hdl.handle.net/10371/45823 | - |
| dc.description | Thesis (doctoral)--서울대학교 대학원 :전기·컴퓨터공학부,2004. | en |
| dc.format.extent | iv, 116 p. | en |
| dc.language.iso | en | en |
| dc.publisher | 서울대학교 대학원 | en |
| dc.subject | self-aligned FinFET | en |
| dc.subject | 이중 게이트 MOSFET | en |
| dc.subject | wide source/drain | en |
| dc.subject | 넓은 소소/드레인 | en |
| dc.subject | non-uniform doping | en |
| dc.subject | 불균일 도핑 | en |
| dc.subject | short channel effect | en |
| dc.subject | 단채널효과 | en |
| dc.title | Design and fabrication of 30nm self-aligned FinFET | en |
| dc.title.alternative | 30nm 자기 정렬형 FinFET 설계 및 제작 | en |
| dc.type | Thesis | - |
| dc.contributor.department | 전기·컴퓨터공학부 | - |
| dc.description.degree | Doctor | en |
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