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ESBM 공정 기술의 개발과 관성 센서에의 응용 : Development of the ESBM (Extended Sacrificial Bulk Micromachining) technology and its application to the fabrication of inertial sensor
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- Authors
- Advisor
- 조동일
- Issue Date
- 2003
- Publisher
- 서울대학교 대학원
- Keywords
- ESBM ; (111)silicon ; (111) 실리콘 ; vertical comb ; 수직 콤 ; perfect offset ; 완전 단차 ; single-crystalline structure ; 단결정 실리콘 구조물 ; z-axis accelerometer
- Description
- 학위논문(박사)--서울대학교 대학원 :전기·컴퓨터공학부,2003.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000059230
https://hdl.handle.net/10371/45876
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