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Q 지수를 고려한 대기압형 초소형 Z축 각속도계 : MEMS Z-axis Non-Vacuum Packaged Gyroscope with the Consideration of the Q-factor
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 김용권 | - |
| dc.contributor.author | 정형균 | - |
| dc.date.accessioned | 2010-01-29T06:10:23Z | - |
| dc.date.available | 2010-01-29T06:10:23Z | - |
| dc.date.copyright | 2009. | - |
| dc.date.issued | 2009 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000036062 | kog |
| dc.identifier.uri | https://hdl.handle.net/10371/46874 | - |
| dc.description | 학위논문(박사) --서울대학교 대학원 :전기. 컴퓨터공학부, 2009.2. | ko |
| dc.format.extent | 136 p. | ko |
| dc.language.iso | ko | ko |
| dc.publisher | 서울대학교 대학원 | ko |
| dc.subject | 대기압형 각속도계 | ko |
| dc.subject | gyroscope | ko |
| dc.subject | Q 지수 | ko |
| dc.subject | atmosphere | ko |
| dc.subject | 빗 모양 전극 | ko |
| dc.subject | Q-factor | ko |
| dc.subject | 끝단 효과 보상 | ko |
| dc.subject | comb electrode | ko |
| dc.subject | 선형 끌림 감쇠 | ko |
| dc.subject | end effect | ko |
| dc.subject | linear drag | ko |
| dc.title | Q 지수를 고려한 대기압형 초소형 Z축 각속도계 | ko |
| dc.title.alternative | MEMS Z-axis Non-Vacuum Packaged Gyroscope with the Consideration of the Q-factor | ko |
| dc.type | Thesis | - |
| dc.contributor.department | 전기. 컴퓨터공학부 | - |
| dc.description.degree | Doctor | ko |
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