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서브픽셀 알고리즘을 적용한 TFT-LCD 셀 공정에서의 기준 정렬키 측정 시스템 개발 : Development of alignment-key measurement system in TFT-LCD CELL-processing using subpixel algorithm

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dc.contributor.advisor박희재-
dc.contributor.author하상모-
dc.date.accessioned2010-02-01T11:03:01Z-
dc.date.available2010-02-01T11:03:01Z-
dc.date.copyright2007.-
dc.date.issued2007-
dc.identifier.urihttp://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000045734kog
dc.identifier.urihttps://hdl.handle.net/10371/48187-
dc.description학위논문(석사)--서울대학교 대학원 :기계항공공학부,2007.ko
dc.format.extentvii, 39 장ko
dc.language.isokoko
dc.publisher서울대학교 대학원ko
dc.subjectTFT-LCDko
dc.subjectTFT-LCDko
dc.subjectCD(Critical Dimension)ko
dc.subjectSubpixel Algorithmko
dc.subject자동초점ko
dc.subjectAuto-Focusingko
dc.subjectSub-pixel Edge Detectionko
dc.subjectAlignment-Keyko
dc.title서브픽셀 알고리즘을 적용한 TFT-LCD 셀 공정에서의 기준 정렬키 측정 시스템 개발ko
dc.title.alternativeDevelopment of alignment-key measurement system in TFT-LCD CELL-processing using subpixel algorithmko
dc.typeThesis-
dc.contributor.department기계항공공학부-
dc.description.degreeMasterko
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